This book aims to help engineering students as well as industry professionals rapidly acquire fundamental knowledge on MEMS devices, its foundations and operation. The MEMS field has evolved from an interesting academic curiosity to a massive business, and many of the books currently available are research-oriented or handbooks and so do not cover the needs of new students and professionals. This book aims to fill that gap and it goes right to the needed equations to understand the concepts. They are illustrated by numerical examples and solved problems. Furthermore, MATLAB files are also provided to solve some of the exercises or problems in the book. The book is meant to be as self-contained as possible, so the students (either at undergraduate or graduate level) can easily grasp the level and understand the MEMS devices operation. Moreover, professionals working in industry will also benefit from the organization and selection of the basic material.